MT 223 High Vacuum Technology

Lecture Hours: 3
Credits: 3

Explains high vacuum concepts, theory, and the various types of vacuum systems. Subjects include vacuum pumps, seals, gauges, valves, power supplies, leak detecting equipment, and related hardware. Covers the set-up, operation, troubleshooting and monitoring of vacuum systems.

Prerequisite: MTH 070 with a grade of C or better; or consent of instructor.
Student Learning Outcomes:

Accurately discuss common vacuum system terminology and theory.
List and identify the various types of vacuum devices.
Explain the operation and construction of common vacuum devices.
Demonstrate how to troubleshoot a vacuum system.
List all vacuum system safety issues.

Content Outline

Overview of vacuum technology and industrial uses
Vacuum physics and types
- Dalton’s law of partial pressures
- Charles’ law
- Boyle’s law
- Avogadro’s law
- Arough, medium, high, ultra-high
- Gas qualities (pressure, temperature, volume, mass)
Vacuum system components
- Pumps
- Gauges
- Joining devices
Gauges
- Gauge reading
- Gauge operation, types, and calibration
  - Bourdon gauge
  - Capacitance manometer gauge
  - Thermocouple gauge
  - Pirai gauge
  - McLeod gauge
  - Thermal ionization gauge
  - Penning gauge
  - Absolute verses indirect gauge
  - Gauge troubleshooting, failure mode and maintenance
Vacuum pumps
- Mean free path
- Viscous and molecular flow
- Pump down
- Vacuum pump operation, types, and construction
  - Drystar
  - Rotary vane
- Vacuum pump troubleshooting, failure mode, and maintenance
Materials used in a vacuum system
- Alloys used in vacuum system
  - Composition
  - Advantages
- Metals used in a vacuum system
  - Composition
  - Advantages
Leaks
- Outgassing
- Real and virtual leaks
- Base pressure
- Rate of rise
- Correction techniques
- Systems checks
Vacuum system safety
- Chemical
- Electrical
- Pressure
- Mechanical